Stage Micrometers

Stage Micrometers and Concentric Squares for Calibrating Distances
Allows for Precise Measurements of Enlarged Images

R1L3S1P

10 mm Stage Micrometer with
50 µm Divisions

R1L3S5P

Combined Resolution and
Distortion Test Target with Micrometer

R3L3S3P

Concentric Squares Calibration Target

Related Items

Test and Calibration Targets

Slide and Target Holders

High-Speed Microscopy Stage

Objective and Scan Lenses

Annular Aperture Obstruction Targets

Reticles

Scientific-Grade Cameras

sCMOS Cameras

Imaging Systems Overview

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Overview
Mounting Options
Custom Capabilities
Cleaning
Feedback

General Specifications
Chrome Thickness	0.120 µm
Chrome Optical Density	OD ≥3 at 430 nm
Substrate Thickness	0.06" (1.5 mm)
Surface Flatness	≤15 µm
Line Spacing Tolerance^a	±1 µm
Line Width Tolerance^a	±0.5 µm
Substrate	Soda Lime Glass

This tolerance is valid for the mask used to create these targets and may differ minimally for the targets themselves.

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An R3L3S3P Stage Micrometer Mounted in an XYF1 Test Target Positioner

Features

Horizontal Stage Micrometers with Divisions from 10 µm to 100 µm (1" x 1" or 3" x 3")
Combined Resolution and Distortion Test Target with Stage Micrometers (3" x 1")
Concentric Squares with Positive Pattern Sizes from 0.1 mm to 50 mm (3" x 3")

Thorlabs offers stage micrometers and concentric square patterns for calibrating distances in an imaging system. These targets feature soda lime glass substrates with vacuum-sputtered, low-reflectivity chrome. Each pattern is manufactured using photolithography, allowing for edge features to be resolved down to approximately 1 µm.

Mounting
These stage micrometers can be mounted in many of our microscope slide holders, including the five highlighted on Mounting Options tab. We also offer a variety of general fixed slide holders, microscope slide holders, and translation stages for microscopy.

Our MAX3SLH fixed slide holder provides two spring clips to mount the optic and can be mounted to any of our 3-axis flexure stages. The MAX3SLH is only compatible with test targets greater than or equal to 1.73" (44.0 mm) wide and provides a clear aperture of 1", which may cover the chrome pattern on some of the test targets. Thorlabs also offers our XYF1(/M) test target positioning mount (see photo above) capable of translating a 1/2" (12.7 mm) to 3" (76.2 mm) wide rectangular target over a 50 mm (1.97") x 30 mm (1.18") area. The mount offers five 8-32 (M4) taps for six post-mountable orientations. The XYF1 uses nylon-tipped setscrews to secure the optic. Please note that the mount's support arms overlap the optic by 4.4 mm on each side. For users of the MLS203 microscopy stage, we offer the MLS203P2 slide holder for inverted microscopes, which can mount slides 25 mm to 26.5 mm wide and petri dishes 30 mm to 60 mm in diameter. We also offer the FFM1 and SFH2 fixed mounts for cage cube- or post-mounting, respectively.

Targets Selection Guide
Resolution Test Targets	Calibration Targets	Distortion Test Targets	Slant Edge MTF Target	Stage Micrometers

Mounting Options
Mount Item #	MAX3SLH	XYF1(/M)	MLS203P2	FFM1 with B3C	SFH2
Image (Click to Enlarge)
Compatible Target Item #s	R1L3S1P, R1L3S2P, R1L3S5P	R1L1S5P^a, R1L3S1P, R1L3S2P, R1L3S5P, R3L3S3P	R1L3S1P, R1L3S2P, R1L3S5P	R1L1S5P, R1L3S1P, R1L3S2P, R1L3S5P, R3L3S3P	R1L1S5P, R1L3S1P, R1L3S2P, R1L3S5P, R3L3S3P
Features/Mounting	Mounts to 3-Axis Stages or Any with 1/4"-20 Taps	XY Translation Ø1/2" Post Mountable	Mounts to Our MLS203-1 and MLS203-2 Fast XY Scanning Stages	Ø1/2" Post Mountable	Ø1/2" Post Mountable

The pattern on this target will be partially obscured by this mount.

Jason Williamson
Director of Business Development
Thorlabs Spectral Works

Questions?
Need a Quote?

Customization Parameters
Substrate Size^a	Min	8 mm x 8 mm (5/16" x 5/16")
Substrate Size^a	Max	85 mm x 85 mm (3.35" x 3.35")
Substrate Materials		Soda Lime Glass UV Fused Silica Quartz
Coating Material		Chrome^b Low-Reflectivity Chrome^c
Coating Optical Density		≥3^d or ≥6^e @ 430 nm
Minimum Pinhole/Spot		Ø1 µm
Minimum Line Width		1 µm
Line Width Tolerance		-0.25 / +0.50 µm
Maximum Line Density		500 lp/mm

Substrates can be diced to custom shapes and sizes.
Chrome Reflectance >40% at 430 nm
Low-Reflectivity Chrome Reflectance >10% at 430 nm
Optical densities of ≥3 at 430 nm for UV fused silica substrates and standard soda lime substrates.
Optical density of ≥6 at 430 nm for quartz substrates and select soda lime substrates.

Custom OEM Test Targets and Reticles

Our in-house photolithographic design and production capabilities enable us to create a range of patterned optics. We manufacture test targets, distortion grids, and reticles at our Thorlabs Spectral Works facility in Columbia, South Carolina. These components have served a wide variety of applications, being implemented in microscopes, imaging systems, and optical alignment setups.

In addition to our catalog test targets and reticles offered from stock, we can provide custom chrome patterns on soda lime, UV fused silica, or quartz substrates from 8 mm by 8 mm up to 85 mm by 85 mm. Substrates can be cut to shape for your application. Our photolithographic coating process allows us to create chrome features down to 1 µm. A few sample patterns are shown below, which can be made positive or negative, as shown in the image directly below.

For a quote on custom test targets and reticles, please contact us at TSW@thorlabs.com.

Sample Patterns

Example Applications

Etched Reticles
Gray Scale Masks
Resolution Reticles
Diagnostic Reticles
Recreational Scopes
Notching Reticles
Eyepiece Scales
Illuminated Crosshairs
Obstruction Targets
Binocular Reticles

Click to Enlarge
Positive and Negative Crosshair Sample Pattern

This tab details an optimal cleaning technique developed by our engineers for cleaning reticles, test targets, distortion targets, and calibration targets.

Cleaning Procedure

Use a clean wet sponge, preferably made of polyvinyl alcohol (PVA), and dish detergent to gently scrub the front and back surfaces of your reticle or target.
Rinse with water.
Blow dry with clean dry air, or allow the reticle or target to air dry on a clean surface.

We do not suggest using a towel, rag, or wipe to dry the surface. If contamination persists, soak the reticle or target in a detergent and water solution for 1 hour, repeating as necessary.

Posted Comments:

user (posted 2023-01-11 09:39:39.03)

I'd like to know if the +/- 1 μm line spacing tolerance is valid for any pair of lines on the target. Or is the tolerance valid only for neighbouring lines, and the tolerance from the first to the last of for example a group of ten lines may be up to +/- 10 μm? I suspect it is the former, but can you please confirm?

Bill Albert (posted 2021-12-01 10:40:26.26)

Can ThorLabs supply calibration certificates with the Stage Micrometer Calibration Targets?

cdolbashian (posted 2021-12-23 01:59:08.0)

Thank you for reaching out to us Bill. Right now, all we can provide is a self certification and/or a certificate of conformance provided you share your product's "TP number", which would be listed on the packaging of your product. We are aiming to provide NIST traceability in the future for our test and resolution targets.

Stephanie G (posted 2021-07-09 06:58:17.04)

Are these compatible with transmission illumination?

YLohia (posted 2021-07-12 08:05:30.0)

Hello, the positive targets consist of a chrome pattern plated on to a clear substrate and are useful for front-lit and general applications. Alternatively, the negative targets (can be custom ordered by emailing your local Thorlabs Tech Support team or techsales@thorlabs.com if you are in the US) use the same chrome coating to cover the substrate, leaving the pattern itself clear, and work well in back-lit and highly illuminated applications.

Richard Krusemark (posted 2021-06-18 11:35:59.29)

You sell this with a specific statement that the unit is "useful for the calibration of distances within imaging systems". Yet this item does not come with any sort of certificate of conformance. Are you kidding me? You can't calibrate something with a complete unknown. Now I have to find a reputable company to calibrate my standards that I just bought that have no standard. I am so glad I waisted my companies money on these. I will be sure not to return to this site for more standards.

cdolbashian (posted 2021-06-25 09:20:35.0)

Thank you for reaching out to us at Thorlabs! Following your feedback, we are working on a version of this product which has a calibration/conformance document included. I have reached out to you directly with some more information.

Stage Micrometer, 1" x 1"

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Close Up of the R1L1S5P Horizontal Scale with Crosshair

1" x 1" (25.4 mm x 25.4 mm) Stage Micrometer
For Calibrating Eyepiece Reticles or Objective Magnification
20 mm Horizontal Scale with 100 µm Divisions and Crosshair

This target features a stage micrometer pattern with 100 µm divisions and numerical labeling every 1 mm. The pattern is oriented horizontally with a 20 mm long scale and a perpendicular crosshair. The target consists of a 1" x 1" soda lime substrate with low-reflectivity, vacuum-sputtered chrome. This positive target is useful for the calibration of distances within imaging systems.

Stage Micrometers, 3" x 1"

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Microscope Image of R1L3S1P Stage Micrometer

For Calibrating Eyepiece Reticles or Objective Magnification
R1L3S1P: 10 mm Scale with 50 µm Divisions
R1L3S2P: 1 mm Scale with 10 µm Divisions
Scales Centered on a 3" x 1" (76.2 mm x 25.4 mm) Microscope Slide

These targets each feature a horizontal stage micrometer pattern. The R1L3S1P micrometer has a 10 mm long scale with 50 µm divisions and numerical labeling every millimeter, while the R1L3S2P has a 1 mm long scale with 10 µm divisions and numerical labeling every 0.1 mm. Both targets consist of a 3" x 1" soda lime substrate with low-reflectivity, vacuum-sputtered chrome. These positive targets are useful for the calibration of distances within imaging systems.

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R1L3S1P Under Magnification

Click for Details
R1L3S2P Under Magnification

Combined Resolution and Distortion Test Target, 3" x 1"

Combined Resolution and Distortion Test Target, 3in x 1in

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Frequencies of NBS 1963A (cycles/mm)

• 4.5	• 10	• 23	• 51	• 114
• 5	• 11	• 25	• 57	• 128
• 5.6	• 12.5	• 29	• 64	• 144
• 6.3	• 14	• 32	• 72	• 161
• 7.1	• 16	• 36	• 81	• 181
• 8	• 18	• 40	• 91	• 203
• 9	• 20	• 45	• 102	• 228

Click to Enlarge
Close Up of R1L3S5P Stage Micrometer

Optical Specifications
Pattern	LR^a Chrome
Background	Clear
Surface Flatness	≤15 µm
Chrome Optical Density^b	≥3.0

Low-Reflectivity
Specified at 430 nm.

3" x 1" x 0.06" (76.2 mm x 25.4 mm x 1.5 mm) Target
Includes NBS 1963A Pattern, Sector Star, Concentric Circles, Grids, Ronchi Rulings, and More (See Table Below)
Determine Resolution of an Optical System
Measure Image Distortion, Astigmatism, and Other Aberrations
Compatible with our MLS203 Microscope Stages via MLS203P2 Slide Holder

The R1L3S5P positive 3" x 1" x 0.06" (76.2 mm x 25.4 mm x 1.5 mm) combined resolution / distortion test targets that are made by vacuum-sputtering low-reflectivity chrome with an optical density of ≥3 at 430 nm on a soda lime glass substrate. They are ideal for calibration of imaging systems and microscope stages. They are sized to fit in our MLS203P2 stage slide holder for use with our MLS203 microscope stages.

The test targets include an NBS 1963A pattern, a sector (Siemens) star, concentric circles, grids, Ronchi rulings, and more (see table below). These targets are useful for testing resolution, field distortion, focus errors, and astigmatism. The NBS 1963A, sector star, and concentric circle targets are useful for measuring imaging resolution. For more information, please see our Resolution Targets page. The grids can be used to measure the distortion introduced by an imaging system. The Ronchi rulings are excellent for evaluating resolution, field distortion, and parfocal stability.

Target Feature	Details	Target Feature	Details
NBS 1963A	Frequencies from 4.5 cycles/mm to 228 cycles/mm (See List Above)	Concentric Circles	10 Circles with Radii from 100 µm to 1000 µm in 100 µm Intervals
Distortion Grid (Squares)	3 Grids: 100 lp/mm^a, 150 lp/mm, 200 lp/mm	Fixed Ronchi Rulings	3 Rulings:100 lp/mm, 150 lp/mm, and 200 lp/mm
Distortion Grid (Dots)	3 Grids: 400 µm Pitch of Ø80 µm Dots, 200 µm Pitch of Ø 40 µm Dots, 100 µm Pitch of Ø20 µm Dots	Variable Ronchi Rulings	20 Rulings (Each 1 mm x 1 mm): 10 lp/mm to 200 lp/mm in 10 lp/mm Intervals
Two-Point Resolution Dots	Ø25 µm, Ø20 µm, Ø15 µm, Ø12.5 µm, Ø10 µm, Ø7.5 µm, and Ø5 µm	Pinholes	Ø25 µm, Ø20 µm, Ø15 µm, Ø12.5 µm, Ø10 µm, Ø7.5 µm, and Ø5 µm
Interdigitated Lines	6.25 lp/mm, 12.5 lp/mm, 25 lp/mm, 50 lp/mm, 100 lp/mm, and 200 lp/mm	Three Micrometers	1 mm x 1 mm XY Scale with 50 µm Divisions 1 mm Scale with 10 µm Divisions 10 mm Scale with 50 µm Divisions
Sector Star	36 Bars through 360°, 50 µm Radius Center Circle, and Ten Concentric Circles with Radii from 100 µm to 500 µm in 50 µm Intervals

The unit lp/mm is line pairs per millimeter.

Concentric Squares Test Target, 3" x 3"

Concentric Squares Test Target, 3in x 3in

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R3L3S3P Concentric Square Pattern

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Close Up of the Squares Smaller than 15 mm Wide on R3L3S3P Concentric Square Target

3" x 3" (76.2 mm x 76.2 mm) Concentric Square Target
Calibrate a Measurement for Imaging Software
Low-Reflectivity, Vacuum-Sputtered Chrome

The R3L3S3P Concentric Square Target features fourteen concentric squares with lengths and widths ranging from 0.1 mm to 50 mm (see table below). Each square is labeled with its width on the target. This target is made from a soda lime glass substrate with low-reflectivity, vacuum-sputtered chrome. These positive targets are useful for the calibration of distances within imaging systems.

Widths of Positive Squares (mm)

	• 0.1	• 0.5	• 2	• 4	• 10	• 20	• 40
	• 0.25	• 1	• 3	• 5	• 15	• 30	• 50